D 2015

A comparison of different measurement methods of mechanical properties of Al thin films

TRUHLÁŘ, Michal; Vilma BURŠÍKOVÁ; Jaroslav SOBOTA and Tomáš KRUML

Basic information

Original name

A comparison of different measurement methods of mechanical properties of Al thin films

Authors

TRUHLÁŘ, Michal; Vilma BURŠÍKOVÁ; Jaroslav SOBOTA and Tomáš KRUML

Edition

1. vydání. Ostrava, NANOCON 2014, 6th International Conference: Conference Proceedings, p. 753-758, 6 pp. 2015

Publisher

TANGER Ltd.

Other information

Language

English

Type of outcome

Proceedings paper

Field of Study

Solid-state physics and magnetism

Country of publisher

Czech Republic

Confidentiality degree

is not subject to a state or trade secret

Publication form

storage medium (CD, DVD, flash disk)

Marked to be transferred to RIV

Yes

RIV identification code

RIV/00216224:14310/15:00082748

Organization

Přírodovědecká fakulta – Repository – Repository

ISBN

978-80-87294-53-6

UT WoS

000350636300129

Keywords (in Czech)

mikrokomprese, nanoindentace, mechanické vlastnosti, Youngův modul

Keywords in English

Microcompression; nanoindentation; mechanical properties; Young modulus

Links

ED2.1.00/03.0086, research and development project.
Changed: 2/9/2020 02:49, RNDr. Daniel Jakubík

Abstract

In the original language

The paper compares two different methods for testing of metallic thin films: microcompression test and nanoindentation. Microcompression test is one possibility how to perform mechanical tests on a very small scale. This method requires preparation of a small cylindrical specimen (micropillar) of micrometric size by FIB and execution of a compression test using nanoindenter device equipped with a flat diamond punch. Stressstrain curves of the thin films were obtained from such tests. Nanoindentation tests were then conducted to compare the results on the same films. Two different metal thin films - AlCuW, AlCuSi with thickness 2 mu m and grain size 3.8 mu m in average were prepared by PVD method. In this paper, we announce the results of measurements, a comparison of the results obtained by each method and identify advantages and limitations of the methods.
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